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Dielectric constants measured for multiple frequencies
Material 1 KHz 10 KHz 100 KHz
?, Dielectric Constant ?, Dielectric Constant ?, Dielectric Constant
Al2O3 0.863 0.958 0.950
AlN 6.527 6.409 6.229
PZT 350.842 340.673 372.776
SiO2 0.170 0.161 0.159
BeO 6.470 6.426 6.372
Table 3. Dielectric constants of heated samples
temperature Al2O3 AlN PZT SiO2 BeO
? C ?, Dielectric Constant ?, Dielectric Constant ?, Dielectric Constant ?, Dielectric Constant ?, Dielectric Constant
26 6...
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Dielectric constants of heated samples
temperature Al2O3 AlN PZT SiO2 BeO
? C ?, Dielectric Constant ?, Dielectric Constant ?, Dielectric Constant ?, Dielectric Constant ?, Dielectric Constant
26 6.583 6.527 352.979 0.179 6.398
31 6.553 6.259 50.253 0.171 6.402
35 6.555 6.487 363.082 0.168 6.373
39 6...
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